The rf mems switches are frequently used in microwave and radio frequency communication devices, such as transmitters and receivers, mode selection switch, antenna switch, etc. This switch has a vast number of applications in the rfmicrowave field, such as configurable voltage control oscillators, filters, and configurable matching networks. The switch is a capacitive type, which is actuated by an electrostatic force. Denhoff1 1institute for microstructural sciences, national research council, ottawa, canada k1a 0r6 2electrical and computer engineering department, university of waterloo, waterloo, canada, n2l 3g1 dated. Switching speed analysis of rf mems switch duepublico. Rf mems technology rf mems refers to components for which moving submillimeter sized parts provide rf functionality.
In this talk, we present several rfmems switch designs that can significantly extend the hotswitching lifetime of rfmems contact switches. Ultra low actuation voltage rf mems switch micro and. Huikai xie most figures and data in this lecture, unless cited otherwise, were taken from rf mems theory, design and technology by g. Intelligent cmos control of rf mems capacitive switches. Symmetric toggle switcha new type of rf mems switch for. Worlds best powerpoint templates crystalgraphics offers more powerpoint templates than anyone else in the world, with over 4 million to choose from. Apr 07, 2017 in this talk, we present several rf mems switch designs that can significantly extend the hotswitching lifetime of rf mems contact switches. A new rf mems switch design with low actuation voltage and high c off c on has been presented and a first set of measurements has been presented to show the device mechanical and rf performances. Rf mems are small mechanical devices fabricated by photolithographic processes, which are used for elemental signal processing functions in rf and microwave frequency circuits. Intelligent cmos control of rf mems capacitive switches by guanghai ding presented to the graduate and research committee of lehigh university. There are various types of quintessential rf mems components, such as rf mems resonators and oscillators.
A comparison between rf mems switches and semiconductor switches p. A free powerpoint ppt presentation displayed as a flash slide show on id. Driving microelectromechanical systems mems with precision. The fabrication of rf mems shunt capacitive switches and mems. Nguyen rf mems for wireless communications imems01 short course attaining highqproblem. The polymeric material is widely used in mems device processes because. This paper emphasis on stateoftheart of the earlier until the current trend and demand, principles, design considerations, key performance and fabrication technology of rf mems switch devices developed over the past few years. Pdf analytical approach in the development of rf mems switches. It has many inherent advantages, in terms of relatively high rf signal power handling and broadband onstate. This work investigates the effect of transient stresses on the durability of rf mems switch, using a benchmarked finite element. A complete platform for rf switch and varactor design.
The key factors of the rf mems switch design are the proper. Rf mems switches fabrication by using su8 technology. A comprehensive study on rf mems switch springerlink. Jun 15, 2015 rf mems component ohmic switch g voltage 40 to 120 v depends on desig operate up to 60ghz operated under 200 n at 10 ghz.
A good agreement between the actuation voltages calculated using developed analytical model and simulated by fem simulator has been observed. Mems switch is compared to previous research results as shown in fig. In this brief a new low actuation voltage rf mems switch is presented which can be integrated and controlled with available cmos technologies. Aug 11, 2015 in this brief a new low actuation voltage rf mems switch is presented which can be integrated and controlled with available cmos technologies. As a switch, the relay is about as fundamental as you can getit uses a voltage to physically open and close a circuit. Omrons mems switch has a spdtsingle pole double throw contact configuration. In this thesis, a fully bicmos embedded rfmems switch for mmwave. A wide variety of mems devices is available, including sensors, actuators and switches. The prior art includes an rf mems frequency tunable fractal antenna for the 0. Rfmems switches for reconfigurable integrated circuits. The picture contains only hotswitching mode experiments. A study of the effect of transient stresses on the fatigue life of rf.
Sem image of ohmic switch by radant 8 electro statically actuated mems micro switch for. It is the short form of micro electro mechanical systems. Both series and shunt mems switches have been considered. Mac dermid with a steady current density of 4 macm. Because of the advantages of mems technology numerous research studies have been devoted to develop rf mems switches. Besides rf mems technology, iiiv compound semiconductor gaas, gan, inp, insb, ferrite, ferroelectric. Despite the advantages in the design of rf mems switches designing a low actuation voltage rf mems switch is still a challenging task. Insidepenton com electronic design adobe pdf logo tiny. While mems switches offer obvious countermeasures for performance issues in smartphones, the. Install a discharge circuit in the switch drive circuit. The beam is balanced on a central pivot to provide a seesaw mechanism. Rf mems have in general seen a remarkable growth in the past two decades due to the immense potentials in defense and commercial applications.
Rf mems switch performance and features such as actuation voltage, insertion loss, isolation and ease with cost of fabrication and applications are compared and. Pdf currently, the technology of microelectromechanical systems is widely used in the. Mems for wireless communications memsbased receiver architecture most direct approach. Rf mems technology is a good candidate to replace the conventional switches and to realize an entire switch matrix. To overcome this problem, a small size rf mems switch utilizing a moving plate with multiple holes supported by a low. To illustrate the applications of the switch, two broadband communication applications for the designed mems switch, broadband voltage controlled oscillator vco and broadband. Rf functionality can be implemented using a variety of rf technologies. To sort the mems applications, lets split them along a system usage line.
The actuation voltage of the rf mems switch is the most important for compatible with modern electronic control circuits and improve lifetime. The most common rf mems control component is a microwave transmission line switch, currently under development for applications requiring low insertion loss, high linearity, moderate switching speeds, and low. Alex school of electronics engineering, vit university, vellore, tamilnadu. The most popular rf mems device is the rf mems switch. The key element of the exploited process is the microchem su8 2002 negative photoresist. Rf mems switches are primed for massmarket applications. Ppt mems optical switches powerpoint presentation free.
For this reason, they are being developed intensively by corporations worldwide for use in. Fundamentals of analog devices rf mems switch technology. Emems switches capacitive shunt switches dccontact shunt switches dccontact series switches 3162005 eel6935 advanced mems spring 2005 instructor. Functional diagrams of two common rf mems switch structures. Rf mems basics rf mems switch manufacturers vendors. The structure of the switch consists of a cpw coplanar waveguides transmission lines and a suspended membrane. Geometry of the rf mems switch as modeled in comsol multiphysics together with the mems module. It is also presented a technique for modeling and design of inductivelytuned mems shunt switch. A design of a capacitiveshunt rfmems switch for 60ghz ismband application is proposed and analyzed. Mems for wireless communications mems based receiver architecture most direct approach. Development of rf mems switches for high power applications.
This page describes rf mems basics with applications and rf mems switch manufacturers. Mems for wireless communications memsbased receiver frontend single highorder. Rf mems are such systems which interact with rf signal. Winner of the standing ovation award for best powerpoint templates from presentations magazine. Rf local oscillator synthesizer w pll and prescaler is a power hog. A special attention is paid to the rf mems switches. Lets take a look at how you can use comsol multiphysics to simulate an rf mems switch. Rfmems switches can be equipped with antenna design to make an antenna recon. High added value applications for rf mems switchesvaricaps the use of mems switches in highend markets depend on 5 key parameters. Ultrasmall radio frequency and microwave microelectromechanical systems rf mems, such as switches, varactors, and phase shifters, exhibit nearly zero power consumption or loss.
To overcome this problem, a small size rf mems switch utilizing a moving plate with multiple holes. Rf mems switches technology full information in hindi gyan sagar. A radiofrequency microelectromechanical system rfmems is a microelectromechanical system with electronic components comprising moving submillimetersized parts that provide radiofrequency rf functionality. Introduction to rf mems switch working and its applications.
Mems are ic devices which will have both electrical as well as mechanical components. Although many rf mems switches shows impressive results in insertion loss and isolation, lifetime and power handling limit some of the applications and implementations of mems switches. A comparison between rf mems switches and semiconductor switches. Rfmems switches technology full information in hindi gyan sagar. Theyll give your presentations a professional, memorable appearance the kind of sophisticated look that todays audiences expect.
An overview of rf mems switches free download as powerpoint presentation. This switch has a vast number of applications in the rf microwave field, such as configurable voltage control oscillators, filters, and configurable matching networks. Milosavljevic abstract an overview of the mems technology development and applications is given in this paper. Over the last decade, a large number of papers have been published on the development of rf mems devices mainly focusing on the rf mems switches as a basic building block for more complex applications. Design and multiphysics analysis of lowloss 60ghz spnt rf. There are different approaches in which high power rf mems switches may be developed.
The mems universe is exploding, as is the need to provide precision control and drivers for these devices. I am indebted to sergio pacheco for introducing me to the rf mems fabrication and measurement. Despite these benefits, rf mems switches are not yet seen in. An rf mems switch is a specific type of memsbased device that can provide switch. Rfmems switches technology full information in hindi. Glenns rf mems switch overcomes this problem through the use of thin film, stress and.
This technology has a great potential to offer superior rf performance with miniaturized dimensions. These switches are the unambiguous micro mechanical switches that are intended to operate at rf to mm wave frequencies, which mean 0. For this reason, they are being developed intensively by corporations worldwide for use in telecommunications equipment. The major part of this chapter is committed to the comparison of the rf mems switches with state of the art solid state. Rf mems basics this chapter provides the basic introduction to rf mems switches. Jan 07, 2014 these devices can switch at rf frequencies and tend to have high isolation, i. High power handling hotswitching rfmems switches youtube. A capacitive rf mems shunt switch shinji kobayashi, hiroshi kawai murata manufacturing co. It is anticipated that there are great challenges in developing such high power rf mems switches, which, however, are of interest for many applications. High added value applications for rfmems switchesvaricaps the use of mems switches in highend markets depend on 5 key parameters.
What you need to know structure and usage of omron mems switch 2smes01. When all the switching elements are pulled down, the switch is in the rf on state. An early prototype simulation, of an oblique view in the onstate 4 techniques of the switch the rf mems device employs two singlepole doublethrow spdt switches, which are mounted at each end of a beam. Introduction to rf mems switches ii mems micro devices, having movable parts, fabricated with processes similar to ic fabrication rf mems mems devices capable of reconfiguring the rf characteristics of a device. When all the beams are in the unactuated position, which is 3 m away from the rf transmission line on the wafer, the switch is in the rf off state.
Early relays were far too slow and power hungry to compete with vacuum. As an example of rf devices, a capacitive mems switch for millimeterwave has been proposed. This paper presents a novel design of a rf mems switch. Two mems chips that have a spst single pole single throw contact configuration are installed on the ceramic package using the flip chip bonding method as shown fig. An rfmems switch utilizes mechanical movement of switch beam to achieve a short or an open circuit in. Pdf on jan 1, 2011, rekha yadav and others published rf mems. The design of a rf mems switch plays an important role. They also include radio frequency rf wave guides, antennas, resonators, oscillators, filters, switches, optical microphones, gratings, and gyros1, 2, 3. There are different approaches in which high power rf mems switches may be developed, such as those based on material improvements 34. May 23, 2014 the rf mems switches are frequently used in microwave and radio frequency communication devices, such as transmitters and receivers, mode selection switch, antenna switch, etc. A novel rf mems switch architecture has been proposed, for vband operation and intended for use in high power applications.
Spst, spdt or xpyt or be used in rf circuits phase shifters. In this paper we present a novel process based on su8 technology for the fabrication of double clamped radio frequency rf microelectromechanical system mems capacitive shunt switches in coplanar configuration. Ultra low actuation voltage rf mems switch micro and nano. If you continue browsing the site, you agree to the use of cookies on this website. Department of electronics and communication engineering, apex institute of engineering and technology, india. Microelectromechanical systems mems technology is an evolving technology that allows device fabrication using components at a submillimeter scale 1 to 100 micrometers. Radiofrequency microelectromechanical system wikipedia. Beyond cmos and rf devices, integrated circuits and technologies.